FF-M1x緊湊型氣體質(zhì)量流量計

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最后更新：2022-11-17 14:13

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FF-M1x

緊湊型氣體質(zhì)量流量計

集成氣體轉(zhuǎn)換模塊
22種氣體嵌入
多參數(shù)輸出：質(zhì)量流量、溫度和壓力
USB-C和藍(lán)牙通信
Namur NE107狀態(tài)指示

小流量氣體質(zhì)量流量計

FLEXI-FLOW Compact FF-M10 和 FF-M11緊湊型氣體質(zhì)量流量計適用于工作壓力在真空和17 bar(a)條件下精確測量0…500 mln/min 和 0…20 ln/min之間的流量。儀表結(jié)合基于毛細(xì)管MEMS技術(shù)快速穩(wěn)定的熱式質(zhì)量流量傳感器和可靠精確的旁路結(jié)構(gòu)。基于TCS技術(shù)，建立準(zhǔn)確的質(zhì)量流量測量，不受溫度和管路壓力變化影響。與集成溫度和上下游壓力傳感器相結(jié)合，22種氣體的嵌入式數(shù)據(jù)庫實(shí)現(xiàn)精準(zhǔn)集成轉(zhuǎn)換。多參數(shù)儀表可提供過程信息：

FF-M10：流量+溫度
FF-M11：流量+溫度+上下游壓力

技術(shù)參數(shù)

Measurement / control system
Flow range (intermediate ranges available)	min. 0…500 mln/min max. 0…20 ln/min (based on N2)
Pressure ranges	FF-M10: not available / FF-M11: 0…17 bar(a)
Accuracy (incl. linearity) (based on actual calibration)	Up to ±0.5% Rd plus ±0.1% FS (N2/Air/O2); for other gases add conversion uncertainty
Repeatability	Flow sensor: < ±0.2% Rd; Pressure sensors: < ±0.2% FS
Turndown ratio	up to 1:1000
Max. operating pressure	16 bar g
Multi Gas/Multi Range	embedded gas data for 22 unique gases plus any mixture of these gases
Response time (sensor)	< 30 ms (T63)
Long term stability	< 0.5% FS over period of 3 years; then < 0.2% FS per year
Mounting	any position, attitude sensitivity negligible
Temperature sensitivity	Flow sensor: zero 0.0015% FS/ºC; span 0.03% Rd/ºC; Pressure sensors: zero 0.16 mbar/ºC; span 0.05% Rd/ºC
Temperature accuracy	± 0.2 ºC (instrument body temperature)
Accuracy pressure sensors	±0.5% FS
Pressure sensitivity	standard: < 0.15% Rd/bar typical N2; with pressure correction: < 0,02% Rd typical N2
Leak integrity, outboard	tested < 2 x 10-9 mbar l/s He

Mechanical parts
Material (wetted parts)	aluminium, stainless steel, silicon nitride, epoxy, aluminium oxide, glass
Surface quality	< 1.6 mu Ra (<0.8 mu Ra for stainless steel body)
Pressure rating (PN)	16 bar(g) / 250 psig
Process connections	optional: compression type, push-in or face seal couplings
Seals	default: FKM 51415; for other materials contact factory
Weight	200 g with Aluminium body, 300 g with SS 316 body
Ingress protection	IP40
Instrument body	Aluminium or Stainless steel (selectable)

Electrical properties
Power supply	24 Vdc ± 10%
Max. power consumption	0.35 Watt
Digital communication	Modbus RTU or FLOW-BUS (selectable)
Support interface	USB-C port for easy setup; Optional Bluetooth connection for monitoring
Electrical connection	9-pin D-sub (male)